500-750 GHz submillimeter-wave MEMS waveguide switch

This paper presents a 500-750 GHz waveguide based single-pole single-throw (SPST) switch achieving a 40% bandwidth. It is the first ever RF MEMS switch reported to be operating above 220 GHz. The switch is based on a MEMS-reconfigurable surface which can block the wave propagation in the waveguide by short-circuiting the electrical field lines of the TE10 mode. The switch is designed for optimized isolation in the blocking state and for optimized insertion loss in the non-blocking state. The measurement results of the first prototypes show better than 15 dB isolation in the blocking state and better than 3 dB insertion loss in the non-blocking state for 500-750 GHz. The higher insertion loss is mainly attributed to the insufficient metal thickness and surface roughness on the waveguide sidewalls. Two switch designs with different number of blocking elements are fabricated and compared. The overall switch bandwidth is limited by the waveguide only and not by the switch technology itself.QC 20160824