Nanogrooving by using multi-tip diamond tools

This chapter introduces nano-grooving approach by using multi-tip diamond tools to generate nanostructures such as nano-gratings/nano-grooves on large substrates. It starts by briefing the work principle and history of this nanofabrication approach. It then introduces the machining mechanism, influences of processing parameters, and tool wear on the machined nanostructures. It concludes with a summary of research challenges, current research achievements, and future research directions to systematically establish this nanofabrication approach