Ordered and disordered evolution of the pore mesostructure in hybrid silica anti-reflective films obtained by one-pot self-assembly method

Hybrid mesoporous silica films were prepared in acid-catalysed medium using a one-pot self-assembly method. A gradual content of methyl groups was introduced into the inorganic framework by co-condensation of tetraethyl orthosilicate and methyltriethoxysilane. To better understand how the ordered and disordered transition occurs in mesoporous hybrid organosilica sytem as function of the MTES molar ratio in the starting solution, textural, chemical and optical properties of the films were studied by transmission electronic microscopy (TEM), grazing-incident small angle X-ray scattering (GISAXS), transmission Fourier transformed infrared (FTIR) and UV–visible spectroscopy. Increasing the loading of the incorporated organic groups (up to 40% in the starting solution) led simultaneously to a disorganization of the pore mesostructure and a reduction in the pore diameter. Concomitantly, a disordered domain of the silica rings in the walls was observed, which created bond strains in the silica wall contributing also to the disorganization of the pore mesostructure. Furthermore, an optimal MTES content was identified in order to obtain antireflection coatings, exhibiting low reflection in the visible range