Low Energy Ions Scattering analysis of graphene layers prepared by CVD technology

This bachelor thesis is focused on the analysis of graphene samples by the Low Energy Ion Scattering (LEIS). The production of graphene layers is realized by the Chemical Vapor Deposition method (CVD) on the Institute of Physical Engineering. Analysis of the samples is taken place in the Central European Institute of Technology (CEITEC) by Qtac 100. The aim of this bachelor thesis is to optimize of technology in order to reduce contaminants in the graphene layer