Depth profiling using laser-induced breakdown spectroscopy method

The diploma thesis deals with the use of Laser-Induced Breakdown Spectroscopy (LIBS) for depth profiling and 3D mapping of the zinc-coated steel used in the automotive industry. Before creating depth maps and depth profiles, optimization of the experiment was performed. It was shown that the LIBS technique is suited for making depth profiles and depth maps. The theoretical part deals with the description of the LIBS instrumentation, characteristics of plasma, and assembling of scientific papers which reflect the up to date knowledge about depth profiling and mapping with the use of the LIBS technique. The experimental part describes the optimization of the experiment. Gate delay, the depth and the diameter of craters using the profilometer, the position of the focal plane relative to the sample surface, and selection of spectral lines with the smallest residual signal and small scattering of data were optimized. Depth profiles of zinc, iron, chromium and manganese with the depth map of zinc and iron were made, and also the depth resolution for both elements was calculated