Measurement of local characteristics of passive electrical devices

Bachelor thesis is focused on the newly conceived local measurement of electrical or photoelectric devices characteristics. According to Moore's law dimensions of active components on the chips diminish. Therefore effort to obtain corresponding reduction of passive electrical components, while improving, or at least maintain their parameters, is also challenged. It turns out that the problems associated with device reducing are connected with existence of physical limits of materials, and ultimately with the impossibility to measure local properties of electrical components using conventional electric methods. Especially in the range of physical limits, a serious problem of defects in materials appears. Due to that the small size components can greatly affect the efficiency, performance, durability and reliability of devices. Measurements made on the passive and active components show a higher resolution of defects on the surface of selected parts than current methods allow. 1) It follows from the results of measurement on capacitors that there are several possible reasons why breakdowns occur, e.g. mechanical defects or the presence of impurities and/ or oxide crystals in the dielectric. 2) Measurements taken at a photodiode allowed visualize minority carriers current, and view their lifetime. Moreover, they also show that the minority carrier lifetime comes mainly from bulk recombination