Low Energy Ion Scattering on Gold Structures

This diploma thesis deals with comparison of experimental and simulated low energy ion scattering spectra. There is a theoretical description of basic principles of low energy ion scattering and description of the spectrometer, which is situated at Institute of physical engineering. It is shown, how to prepare samples using the colloidal gold solution. The deposition of gold nanoparticles is characterized. The usage and meaning of time and energy spectra of low energy ion scattering is explained. There is also shown the effect of channeling in Si substrate