Pressure sensor made 3D structure

This thesis deals with the points at issue of a 3D structure pressure sensor. The pressure sensor converts pressure into another physical quantity which is easier measure and which is processed subsequently. Usually ways of pressure sensing is for example capacitive, strain-gauge and optical. The 3D structures are constructed through the use of a LTCC technology, which can be laminated to create multi-layer structures, compared to standard high-temperature ceramics. Passive circuit components can be applied onto particular ceramic layers using either thin-layer or thick-layer technology. Practice part of thesis deals with several ways of construction a pressure sensor. First of all capacitive, strain-gauge and optical sensor and possible problems with construction individual sensors above all problems with lamination, cavity or burnin