Diagnostics of passivation layers for crystalline silicon solar cellls.

The work deals with a comparison of existing and perspective types of passivation and anti-reflective coating for silicon solar cells. The theoretical part describes the appropriate methodology for the characterization of these layers and focuses on the passivation layers based on Al2O3. The practical part describes design and verification operations of the equipment for measuring of the amount of fixed charge in the passivation layers using corona discharge. It also describes the implementation of equipment and the results of indicative tests for positive and negative polarity of high voltage. The final part discusses the possibility of equipment improving