Study of interface graphene-on-silicon by EBIC method

This bachelor thesis is dedicated to study of interface graphene-on-silicon located on solar cell with graphene layer. The interface was studied by EBIC method and Raman spectroscopy. Solar cells with graphene sheet was fabricated using electron litography, chemical etching and graphene made by CVD method. The thesis describes fabrication of solar cells with graphene layer, method EBIC measured on SEM and analysis of changes graphene-on-silicon interface caused by enlightenment electron beam by Raman spectroscopy. In theorethical part is described p-n junction and Schottky junction of solar cell, graphene and its fabrication, as well as EBIC method fundamentals