We describe an inertial measurement device based on an electrodynamically trapped proof mass. Mechanical constraints are replaced by guiding fields, permitting the trap stiffness to be tuned dynamically. Optical readout of the proof mass motion provides a measurement of acceleration and rotation, resulting in an integrated six degree of freedom inertial measurement device. We demonstrate such a device—constructed without microfabrication—with sensitivity comparable to that of commercial microelectromechanical systems technology and show how trapping parameters may be adjusted to increase dynamic range.National Science Foundation (U.S.) (NSF under Grant No. CCR-0122419)Massachusetts Institute of Technology. Center for Bits and Atom
Abstract – We present the design of an all-accelerometer inertial measurement unit (IMU). The IMU fo...
This paper presented one single chip micro inertial measurement unit based on ordinary bulk micromac...
Abstract – We present the design of an all-accelerometer inertial measurement unit (IMU). The IMU fo...
Thesis (Ph. D.)--Massachusetts Institute of Technology, School of Architecture and Planning, Program...
Inertial sensors are designed to convert, or transduce, a physical phenomenon into a measurable sign...
A high-Q, mode-matched, vibratory tuning fork based MEMS device, capable of sensing rotational and t...
Since the theory of gravity was published by Issac Newton in the seventeenth century, scientists hav...
Abstract: In the paper a review is given of the current state of the art of micromachined inertial s...
Micro-machined electromechanical systems (MEMS) industry has seen rapid development and gained wide ...
A new mechanism of acceleration detection is discussed in this paper, on the basis of which micromac...
In this thesis a method for testing the dynamic accuracy of micro-electro-mechanical systems (MEMS) ...
An inertial measurement apparatus has mechanically bendable beams that have an isosceles trapezoid c...
International audienceIn this paper, a preliminary analysis of a 6-axis micromachined Inertial Measu...
Inertial sensors were only restricted to applications such as military and aerospace systems in whic...
We present the design of an all-accelerometer inertial measurement unit (IMU). The IMU forms part o...
Abstract – We present the design of an all-accelerometer inertial measurement unit (IMU). The IMU fo...
This paper presented one single chip micro inertial measurement unit based on ordinary bulk micromac...
Abstract – We present the design of an all-accelerometer inertial measurement unit (IMU). The IMU fo...
Thesis (Ph. D.)--Massachusetts Institute of Technology, School of Architecture and Planning, Program...
Inertial sensors are designed to convert, or transduce, a physical phenomenon into a measurable sign...
A high-Q, mode-matched, vibratory tuning fork based MEMS device, capable of sensing rotational and t...
Since the theory of gravity was published by Issac Newton in the seventeenth century, scientists hav...
Abstract: In the paper a review is given of the current state of the art of micromachined inertial s...
Micro-machined electromechanical systems (MEMS) industry has seen rapid development and gained wide ...
A new mechanism of acceleration detection is discussed in this paper, on the basis of which micromac...
In this thesis a method for testing the dynamic accuracy of micro-electro-mechanical systems (MEMS) ...
An inertial measurement apparatus has mechanically bendable beams that have an isosceles trapezoid c...
International audienceIn this paper, a preliminary analysis of a 6-axis micromachined Inertial Measu...
Inertial sensors were only restricted to applications such as military and aerospace systems in whic...
We present the design of an all-accelerometer inertial measurement unit (IMU). The IMU forms part o...
Abstract – We present the design of an all-accelerometer inertial measurement unit (IMU). The IMU fo...
This paper presented one single chip micro inertial measurement unit based on ordinary bulk micromac...
Abstract – We present the design of an all-accelerometer inertial measurement unit (IMU). The IMU fo...