Silver nanoparticle structures realized by digital surface micromachining
- Schmidt, Martin Arnold
- Lam, Eric Wing-Jing
- Li, Hanqing
Publication date
June 2009
DOI Publisher
Institute of Electrical and Electronics Engineers (IEEE)Abstract
We report a new surface micromachining process using commercial silver nanoparticle inks and digital fabrication methods. This process is entirely digital (non-lithographic patterning), the feature sizes can be <20 mum, and the maximum temperature is less than 250degC. Furthermore, we have completed materials property characterization in order to enable design in this process. As a demonstration, silver cantilevers were fabricated using this process and subsequently characterized to determine the silver film's mechanical properties.United States. Defense Advanced Research Projects Agency (N/MEMS Fundamentals Program)Hewlett-Packard Compan
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