Add to ORKGContains reports on thirteen research projects and a list of publications.Defense Advanced Research Projects Agency/U.S. Army Research Office Contract DAAL03-88-K-0108National Science Foundation Grant ECS 89-21728MIT Lincoln Laboratory Innovative Research ProgramSEMATECH Contract 90-MC-503Micrion Contract M08774U.S. Army Research Office Contract DAAL03-87-K-0126IBM Corporatio
[[abstract]]© 1983 Institute of Electrical and Electronics Engineers-Submicrometer focused ion beams...
SIGLEAvailable from British Library Document Supply Centre- DSC:2265.63F(BR--100130)(microfiche) / B...
[[abstract]]Submicrometer focused ion beams have been used both for the maskless ion implantation of...
Contains reports on ten research projects.U.S. Army Research Office Contract DAAL03-88-K-0108Hughes ...
Ion beam processing of materials in general and semiconductors in particular, started with ion impla...
[[abstract]]© 1984 Institute of Electrical and Electronics Engineers-Submicrometer focused ion beams...
This paper provides an overview of the Ion Beam Modification and Analysis Laboratory facilities and ...
Applications of focused ion and cluster beams emitted by liquid metal ion sources are particularly a...
Contains reports on three research projects and a list of publications.3M Company Faculty Developmen...
[[abstract]]Summary form only given. Submicrometer focused ion beams have been used for selective io...
In order to rapidly prototype novel devices with nanoscale precision, new fabrication techniques whi...
Focused Ion Beams (FIB) are widely used in the semiconductor industry for milling, sputtering and im...
Ion beam sources for material processing in their working are no different from those required for s...
[[abstract]]© 1983 Institute of Electrical and Electronics Engineers-Submicrometer focused ion beams...
SIGLEAvailable from British Library Document Supply Centre- DSC:2265.63F(BR--100130)(microfiche) / B...
[[abstract]]Submicrometer focused ion beams have been used both for the maskless ion implantation of...
Contains reports on ten research projects.U.S. Army Research Office Contract DAAL03-88-K-0108Hughes ...
Ion beam processing of materials in general and semiconductors in particular, started with ion impla...
[[abstract]]© 1984 Institute of Electrical and Electronics Engineers-Submicrometer focused ion beams...
This paper provides an overview of the Ion Beam Modification and Analysis Laboratory facilities and ...
Applications of focused ion and cluster beams emitted by liquid metal ion sources are particularly a...
Contains reports on three research projects and a list of publications.3M Company Faculty Developmen...
[[abstract]]Summary form only given. Submicrometer focused ion beams have been used for selective io...
In order to rapidly prototype novel devices with nanoscale precision, new fabrication techniques whi...
Focused Ion Beams (FIB) are widely used in the semiconductor industry for milling, sputtering and im...
Ion beam sources for material processing in their working are no different from those required for s...
[[abstract]]© 1983 Institute of Electrical and Electronics Engineers-Submicrometer focused ion beams...
SIGLEAvailable from British Library Document Supply Centre- DSC:2265.63F(BR--100130)(microfiche) / B...
[[abstract]]Submicrometer focused ion beams have been used both for the maskless ion implantation of...