Add to ORKGToday, using of nanostructured materials in microelectromechanical systems (MEMS) is very perspective. One of such materials is anodic aluminum oxide that has electrical and mechanical properties not worse than other materials that are currently used in manufacturing of MEMS devices. This article presents the results of research in methodology and measurement of Young's modulus of free aluminum oxide films
Use of atomic layer deposition (ALD) in microelectromechanical systems (MEMS) has increased as ALD e...
Mechanical properties such as thickness, hardness, and wear resistance of an anodic oxide layer on a...
Results of the application of a theory concerning elasticity of composite materials to calculate the...
Aluminum oxide features good electrical properties such as high dielectric constant and high breakdo...
Aluminum oxide features good electrical properties such as high dielectric constant and high breakdo...
A continuous, dense aluminum oxide (Al2O3) layer of about 5 nm forms on the surface of Al alloys upo...
This paper determines the Young's modulus of nanohoneycomb structures by flexural testing in an...
We assessed mechanical properties of free-standing atomic-layer-deposited (ALD) Al2O3 thin films, mi...
SIGLEAvailable from British Library Lending Division - LD:D53032/85 / BLDSC - British Library Docume...
International audienceThe elastic modulus of thin films can be directly determined by instrumented i...
The mechanical instability of anodic oxide films formed on aluminum rod surfaces was analyzed using ...
The mechanical properties of the thin film materials used in RF-MEMS are crucial for the reliability...
Anodic alumina has been used widely for corrosion protection of aluminum surfaces or as a dielectric...
Engineering ceramics have found use in many applications, such as engine parts, ball bearings, artif...
The article presents the dependence of the morphology as well as micromechanical and sclerometric pr...
Use of atomic layer deposition (ALD) in microelectromechanical systems (MEMS) has increased as ALD e...
Mechanical properties such as thickness, hardness, and wear resistance of an anodic oxide layer on a...
Results of the application of a theory concerning elasticity of composite materials to calculate the...
Aluminum oxide features good electrical properties such as high dielectric constant and high breakdo...
Aluminum oxide features good electrical properties such as high dielectric constant and high breakdo...
A continuous, dense aluminum oxide (Al2O3) layer of about 5 nm forms on the surface of Al alloys upo...
This paper determines the Young's modulus of nanohoneycomb structures by flexural testing in an...
We assessed mechanical properties of free-standing atomic-layer-deposited (ALD) Al2O3 thin films, mi...
SIGLEAvailable from British Library Lending Division - LD:D53032/85 / BLDSC - British Library Docume...
International audienceThe elastic modulus of thin films can be directly determined by instrumented i...
The mechanical instability of anodic oxide films formed on aluminum rod surfaces was analyzed using ...
The mechanical properties of the thin film materials used in RF-MEMS are crucial for the reliability...
Anodic alumina has been used widely for corrosion protection of aluminum surfaces or as a dielectric...
Engineering ceramics have found use in many applications, such as engine parts, ball bearings, artif...
The article presents the dependence of the morphology as well as micromechanical and sclerometric pr...
Use of atomic layer deposition (ALD) in microelectromechanical systems (MEMS) has increased as ALD e...
Mechanical properties such as thickness, hardness, and wear resistance of an anodic oxide layer on a...
Results of the application of a theory concerning elasticity of composite materials to calculate the...