Introduction. When operating high-precision measurement setups, the reliability of measurements needs to be guaranteed. The displacement of elements from the measurement path can lead to a distortion of measurement results, especially in measurement setups operating in the microwave range. In order to ensure measurement reliability, the positions of elements in the measurement setup needs to be monitored. The monitoring should be performed during the measurement. The control device, which should be connected to the automatic control system of the measurement setup, should neither mechanically affect the setup elements nor introduce any interference. Currently used control systems for the technical characteristics do not meet the necessary r...
[[abstract]]A laser interferometer system based on three design principles, the heterodyne frequency...
A method for improving resolution of grating interferometer displacement measuring system is develop...
This dissertation presents the measurement principles, theoretical analysis and experimental results...
This article presents in detail the methodology and results of test studies of the functionality of ...
The paper describes high-precision contactless optical devices for measuring small linear and angula...
In this study, a static displacement monitoring program was developed to maintain the accurate perfo...
This paper presents a multifunctional imaging system with a sensing unit including integrated microw...
Background. The principle of automated control and monitoring systems’ operation is based on the wi...
Lithographic exposure equipment for integrated circuit manufacturing requires ever more accurate pos...
Abstract This thesis describes position-sensitive devices (PSDs) and optical sensor systems suitabl...
This paper describes the possibilities of measuring deformation of machine tool components based on ...
The aim is to develop the mathematical method of determining displacements relatively to the project...
A study has been made of the principles involved in displacement measurement using optical methods, ...
AbstractIt is difficult to monitor the displacement of large structures accurately in real time for ...
Abstract: Among the sensors mainly used for displacement measurement, there are a linear CCD(Charge ...
[[abstract]]A laser interferometer system based on three design principles, the heterodyne frequency...
A method for improving resolution of grating interferometer displacement measuring system is develop...
This dissertation presents the measurement principles, theoretical analysis and experimental results...
This article presents in detail the methodology and results of test studies of the functionality of ...
The paper describes high-precision contactless optical devices for measuring small linear and angula...
In this study, a static displacement monitoring program was developed to maintain the accurate perfo...
This paper presents a multifunctional imaging system with a sensing unit including integrated microw...
Background. The principle of automated control and monitoring systems’ operation is based on the wi...
Lithographic exposure equipment for integrated circuit manufacturing requires ever more accurate pos...
Abstract This thesis describes position-sensitive devices (PSDs) and optical sensor systems suitabl...
This paper describes the possibilities of measuring deformation of machine tool components based on ...
The aim is to develop the mathematical method of determining displacements relatively to the project...
A study has been made of the principles involved in displacement measurement using optical methods, ...
AbstractIt is difficult to monitor the displacement of large structures accurately in real time for ...
Abstract: Among the sensors mainly used for displacement measurement, there are a linear CCD(Charge ...
[[abstract]]A laser interferometer system based on three design principles, the heterodyne frequency...
A method for improving resolution of grating interferometer displacement measuring system is develop...
This dissertation presents the measurement principles, theoretical analysis and experimental results...