Add to ORKGThesis (M.S.)--Massachusetts Institute of Technology, Dept. of Electrical Engineering and Computer Science, 1997.Includes bibliographical references (leaves 89-91).by Minh Sy Le.M.S
In order to meet present and upcoming challenges to reduce feature sizes below 22 nm, advanced plasm...
Thesis: M. Eng. in Manufacturing, Massachusetts Institute of Technology, Department of Mechanical En...
Thesis (M.S.)--Massachusetts Institute of Technology, Dept. of Mechanical Engineering, 1997.Includes...
Thesis (M. Eng.)--Massachusetts Institute of Technology, Dept. of Electrical Engineering and Compute...
Thesis (M.Eng. and S.B.)--Massachusetts Institute of Technology, Dept. of Electrical Engineering and...
The purpose of this dissertation is to explore how real-time feedback control may be used to improve...
Thesis (Ph. D.)--Massachusetts Institute of Technology, Dept. of Mechanical Engineering, 1996.Includ...
This thesis presents new techniques to investigate and understand the source of process variability ...
Thesis (M.S.)--Massachusetts Institute of Technology, Dept. of Electrical Engineering and Computer S...
Thesis (Ph. D.)--Massachusetts Institute of Technology, Dept. of Chemical Engineering, 1995.Includes...
Thesis (M.S.)--Massachusetts Institute of Technology, Dept. of Materials Science and Engineering, 19...
A collaborative experimental effort was initiated at a workshop at the 1988 Gaseous Electronics Conf...
Thesis (S.M.)--Massachusetts Institute of Technology, Dept. of Mechanical Engineering, 2005.Includes...
Thesis (Ph.D.)--Massachusetts Institute of Technology, Dept. of Chemical Engineering, 2002.Includes ...
Plasma etching equipment used for sub-micron integrated circuit fabrication at present are exclusive...
In order to meet present and upcoming challenges to reduce feature sizes below 22 nm, advanced plasm...
Thesis: M. Eng. in Manufacturing, Massachusetts Institute of Technology, Department of Mechanical En...
Thesis (M.S.)--Massachusetts Institute of Technology, Dept. of Mechanical Engineering, 1997.Includes...
Thesis (M. Eng.)--Massachusetts Institute of Technology, Dept. of Electrical Engineering and Compute...
Thesis (M.Eng. and S.B.)--Massachusetts Institute of Technology, Dept. of Electrical Engineering and...
The purpose of this dissertation is to explore how real-time feedback control may be used to improve...
Thesis (Ph. D.)--Massachusetts Institute of Technology, Dept. of Mechanical Engineering, 1996.Includ...
This thesis presents new techniques to investigate and understand the source of process variability ...
Thesis (M.S.)--Massachusetts Institute of Technology, Dept. of Electrical Engineering and Computer S...
Thesis (Ph. D.)--Massachusetts Institute of Technology, Dept. of Chemical Engineering, 1995.Includes...
Thesis (M.S.)--Massachusetts Institute of Technology, Dept. of Materials Science and Engineering, 19...
A collaborative experimental effort was initiated at a workshop at the 1988 Gaseous Electronics Conf...
Thesis (S.M.)--Massachusetts Institute of Technology, Dept. of Mechanical Engineering, 2005.Includes...
Thesis (Ph.D.)--Massachusetts Institute of Technology, Dept. of Chemical Engineering, 2002.Includes ...
Plasma etching equipment used for sub-micron integrated circuit fabrication at present are exclusive...
In order to meet present and upcoming challenges to reduce feature sizes below 22 nm, advanced plasm...
Thesis: M. Eng. in Manufacturing, Massachusetts Institute of Technology, Department of Mechanical En...
Thesis (M.S.)--Massachusetts Institute of Technology, Dept. of Mechanical Engineering, 1997.Includes...