A laser-assisted microchemistry system for the fabrication of small electromechanical devices

Nassuphis, Nick I

Publication date

January 1994

Publisher

Massachusetts Institute of Technology

Abstract

Thesis (M.S.)--Massachusetts Institute of Technology, Dept. of Mechanical Engineering, 1994.Includes bibliographical references (leaves 80-82).by Nick I. Nassuphis.M.S

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A laser-assisted microchemistry system for the fabrication of small electromechanical devices

Abstract

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A laser-assisted microchemistry system for the fabrication of small electromechanical devices

Abstract

Extracted data

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