Add to ORKGThesis (M.S.)--Massachusetts Institute of Technology, Dept. of Electrical Engineering and Computer Science, 1998.Includes bibliographical references (p. 67-70).by Joseph Y.-J. Young.M.S
The paper presents simulations of air damping in MEMS, including squeeze-film and viscous dissipatio...
Closed-form expressions for the stiffness and the damping coefficients of a squeeze film are derived...
AbstractThe experimental evaluation of damping-improved parallel-plate geometries is reported in thi...
Correct modelling of damping is essential to capture the dynamic behaviour of a MEMS device. Our int...
Squeeze-film damping of flexible microcantilevers at low ambient pressures: theory and experimen
[[abstract]]This report demonstrates the tuning the quality factor of a micromachined structure usin...
Prepared at Lewis Research Center.Cover title.Includes bibliographical references (p. 17-18).Mode of...
International audienceCorrect modelling of damping is essentiel to capture the dynamic behaviour of ...
Many MEMS devices employ parallel plates for capacitive sensing and actuation. The desire to get a s...
This document proposes a formulation of the squeeze film air damping in micro-plates. The nonlinear ...
Squeeze film damping due to the air trapped between oscillating membrane structure and a fixed subst...
Squeeze film effects naturally occur in dynamic MEMS structures because most of these structures em...
A reduced-order piecewise-linear model of squeeze-film damping for deformable structures including l...
The experimental evaluation of damping-improved parallel-plate geometries is reported in this paper....
Evaluation of squeezed film air damping is critical in the design and control of dynamic MEMS device...
The paper presents simulations of air damping in MEMS, including squeeze-film and viscous dissipatio...
Closed-form expressions for the stiffness and the damping coefficients of a squeeze film are derived...
AbstractThe experimental evaluation of damping-improved parallel-plate geometries is reported in thi...
Correct modelling of damping is essential to capture the dynamic behaviour of a MEMS device. Our int...
Squeeze-film damping of flexible microcantilevers at low ambient pressures: theory and experimen
[[abstract]]This report demonstrates the tuning the quality factor of a micromachined structure usin...
Prepared at Lewis Research Center.Cover title.Includes bibliographical references (p. 17-18).Mode of...
International audienceCorrect modelling of damping is essentiel to capture the dynamic behaviour of ...
Many MEMS devices employ parallel plates for capacitive sensing and actuation. The desire to get a s...
This document proposes a formulation of the squeeze film air damping in micro-plates. The nonlinear ...
Squeeze film damping due to the air trapped between oscillating membrane structure and a fixed subst...
Squeeze film effects naturally occur in dynamic MEMS structures because most of these structures em...
A reduced-order piecewise-linear model of squeeze-film damping for deformable structures including l...
The experimental evaluation of damping-improved parallel-plate geometries is reported in this paper....
Evaluation of squeezed film air damping is critical in the design and control of dynamic MEMS device...
The paper presents simulations of air damping in MEMS, including squeeze-film and viscous dissipatio...
Closed-form expressions for the stiffness and the damping coefficients of a squeeze film are derived...
AbstractThe experimental evaluation of damping-improved parallel-plate geometries is reported in thi...