Add to ORKGThesis (S.M.)--Massachusetts Institute of Technology, Dept. of Materials Science and Engineering, 1997.Includes bibliographical references (p. 62-64).by Kenneth Chu-Chao Wu.S.M
In the 1980’s science and technology have pushed towards miniaturization. In order to interface to t...
Thesis (M.S.)--Massachusetts Institute of Technology, Dept. of Materials Science and Engineering, 19...
A comprehensive, well-proven reference work on state-of-the-art MEMS materials, technologies and man...
Thesis (Sc. D.)--Massachusetts Institute of Technology, Dept. of Electrical Engineering and Computer...
Thesis (Ph. D.)--Massachusetts Institute of Technology, Dept. of Electrical Engineering and Computer...
AbstractThis paper studies on micro fabrication methods for MEMS. Silicon micromachining has been a ...
Thesis (Ph. D.)--Massachusetts Institute of Technology, Dept. of Electrical Engineering and Computer...
AbstractThis paper studies on micro fabrication methods for MEMS. Silicon micromachining has been a ...
Thesis (Ph. D.)--Massachusetts Institute of Technology, Dept. of Materials Science and Engineering, ...
Thesis (Ph.D.)--Massachusetts Institute of Technology, Dept. of Materials Science and Engineering, 1...
Microelectromechanical systems (MEMS) is a rapidly growing field with numerous current and potential...
Thesis (S.M.)--Massachusetts Institute of Technology, Dept. of Mechanical Engineering, February 2001...
Thesis (Ph.D.)--Massachusetts Institute of Technology, Dept. of Materials Science and Engineering, 2...
Thesis (Ph. D.)--Massachusetts Institute of Technology, Dept. of Mechanical Engineering, 1995.Vita.I...
Thesis (S.M.)--Massachusetts Institute of Technology, Dept. of Mechanical Engineering, 2003.Includes...
In the 1980’s science and technology have pushed towards miniaturization. In order to interface to t...
Thesis (M.S.)--Massachusetts Institute of Technology, Dept. of Materials Science and Engineering, 19...
A comprehensive, well-proven reference work on state-of-the-art MEMS materials, technologies and man...
Thesis (Sc. D.)--Massachusetts Institute of Technology, Dept. of Electrical Engineering and Computer...
Thesis (Ph. D.)--Massachusetts Institute of Technology, Dept. of Electrical Engineering and Computer...
AbstractThis paper studies on micro fabrication methods for MEMS. Silicon micromachining has been a ...
Thesis (Ph. D.)--Massachusetts Institute of Technology, Dept. of Electrical Engineering and Computer...
AbstractThis paper studies on micro fabrication methods for MEMS. Silicon micromachining has been a ...
Thesis (Ph. D.)--Massachusetts Institute of Technology, Dept. of Materials Science and Engineering, ...
Thesis (Ph.D.)--Massachusetts Institute of Technology, Dept. of Materials Science and Engineering, 1...
Microelectromechanical systems (MEMS) is a rapidly growing field with numerous current and potential...
Thesis (S.M.)--Massachusetts Institute of Technology, Dept. of Mechanical Engineering, February 2001...
Thesis (Ph.D.)--Massachusetts Institute of Technology, Dept. of Materials Science and Engineering, 2...
Thesis (Ph. D.)--Massachusetts Institute of Technology, Dept. of Mechanical Engineering, 1995.Vita.I...
Thesis (S.M.)--Massachusetts Institute of Technology, Dept. of Mechanical Engineering, 2003.Includes...
In the 1980’s science and technology have pushed towards miniaturization. In order to interface to t...
Thesis (M.S.)--Massachusetts Institute of Technology, Dept. of Materials Science and Engineering, 19...
A comprehensive, well-proven reference work on state-of-the-art MEMS materials, technologies and man...