Add to ORKGThesis (Sc. D.)--Massachusetts Institute of Technology, Dept. of Electrical Engineering and Computer Science, 1996.Includes bibliographical references (p. 195-205).Theodore M. Bloomstein.Sc.D
AbstractThis paper studies on micro fabrication methods for MEMS. Silicon micromachining has been a ...
Thesis (Ph. D.)--Massachusetts Institute of Technology, Dept. of Chemical Engineering, 1994.Includes...
Thesis (Sc. D.)--Massachusetts Institute of Technology, Dept. of Materials Science and Engineering, ...
Thesis (S.M.)--Massachusetts Institute of Technology, Dept. of Materials Science and Engineering, 19...
Thesis (Ph. D.)--Massachusetts Institute of Technology, Dept. of Electrical Engineering and Computer...
Thesis (M.S.)--Massachusetts Institute of Technology, Dept. of Mechanical Engineering, 1994.Includes...
Thesis (Ph. D.)--Massachusetts Institute of Technology, Dept. of Mechanical Engineering, 1995.Includ...
Dry etching and micromachining with laser radiation of short wavelength and pulse length are investi...
Thesis (Ph. D.)--Massachusetts Institute of Technology, Dept. of Electrical Engineering and Computer...
Laser-assisted chemical etching was conducted for creating periodic textures on silicon surfaces. Si...
Thesis (Ph. D.)--Massachusetts Institute of Technology, Dept. of Mechanical Engineering, 1995.Vita.I...
The performance of high speed optoelectronic and microelectronic devices largely depends on the uniq...
Thesis (M.S.)--Massachusetts Institute of Technology, Dept. of Mechanical Engineering, 1987.Includes...
Thesis (M.S.)--Massachusetts Institute of Technology, Dept. of Electrical Engineering and Computer S...
International audienceWe demonstrate a structuring method for crystalline silicon using nanosecond l...
AbstractThis paper studies on micro fabrication methods for MEMS. Silicon micromachining has been a ...
Thesis (Ph. D.)--Massachusetts Institute of Technology, Dept. of Chemical Engineering, 1994.Includes...
Thesis (Sc. D.)--Massachusetts Institute of Technology, Dept. of Materials Science and Engineering, ...
Thesis (S.M.)--Massachusetts Institute of Technology, Dept. of Materials Science and Engineering, 19...
Thesis (Ph. D.)--Massachusetts Institute of Technology, Dept. of Electrical Engineering and Computer...
Thesis (M.S.)--Massachusetts Institute of Technology, Dept. of Mechanical Engineering, 1994.Includes...
Thesis (Ph. D.)--Massachusetts Institute of Technology, Dept. of Mechanical Engineering, 1995.Includ...
Dry etching and micromachining with laser radiation of short wavelength and pulse length are investi...
Thesis (Ph. D.)--Massachusetts Institute of Technology, Dept. of Electrical Engineering and Computer...
Laser-assisted chemical etching was conducted for creating periodic textures on silicon surfaces. Si...
Thesis (Ph. D.)--Massachusetts Institute of Technology, Dept. of Mechanical Engineering, 1995.Vita.I...
The performance of high speed optoelectronic and microelectronic devices largely depends on the uniq...
Thesis (M.S.)--Massachusetts Institute of Technology, Dept. of Mechanical Engineering, 1987.Includes...
Thesis (M.S.)--Massachusetts Institute of Technology, Dept. of Electrical Engineering and Computer S...
International audienceWe demonstrate a structuring method for crystalline silicon using nanosecond l...
AbstractThis paper studies on micro fabrication methods for MEMS. Silicon micromachining has been a ...
Thesis (Ph. D.)--Massachusetts Institute of Technology, Dept. of Chemical Engineering, 1994.Includes...
Thesis (Sc. D.)--Massachusetts Institute of Technology, Dept. of Materials Science and Engineering, ...