Add to ORKGThesis (Ph. D.)--Massachusetts Institute of Technology, Dept. of Electrical Engineering and Computer Science, 1994.Includes bibliographical references (leaves 263-274).by Scott D. Hector.Ph.D
Lithography simulation has become an indispensable tool for understanding and optimization of lithog...
10.1088/0022-3727/32/22/102Journal of Physics D: Applied Physics3222L114-L118JPAP
Thesis (Ph. D.)--Massachusetts Institute of Technology, Dept. of Electrical Engineering and Computer...
Thesis (Ph. D.)--Massachusetts Institute of Technology, Dept. of Electrical Engineering and Computer...
Thesis (B.S.)--Massachusetts Institute of Technology, Dept. of Electrical Engineering and Computer S...
Thesis (Sc. D.)--Massachusetts Institute of Technology, Dept. of Electrical Engineering and Computer...
Thesis (S.B. and M.Eng.)--Massachusetts Institute of Technology, Dept. of Electrical Engineering and...
The optimal conditions to print the 0.13 mu m line and space are presented for newly constructed x-r...
Image resolution in x-ray proximity printing is influenced by diffraction, photo and Auger electron ...
Grating based X-ray phase contrast imaging sets out to overcome the limits of conventional X-ray ima...
The current paper is concerned on one of the most important branch of medical picture modality...
Thesis (Ph. D.)--Massachusetts Institute of Technology, Dept. of Electrical Engineering and Computer...
Thesis (Ph. D.)--Massachusetts Institute of Technology, Dept. of Electrical Engineering and Computer...
This paper proposes the use of a genetic algorithm to optimize mask and illumination geometries in o...
This paper illustrates the use of genetic algorithms (GA) in optimizing mask and illumination source...
Lithography simulation has become an indispensable tool for understanding and optimization of lithog...
10.1088/0022-3727/32/22/102Journal of Physics D: Applied Physics3222L114-L118JPAP
Thesis (Ph. D.)--Massachusetts Institute of Technology, Dept. of Electrical Engineering and Computer...
Thesis (Ph. D.)--Massachusetts Institute of Technology, Dept. of Electrical Engineering and Computer...
Thesis (B.S.)--Massachusetts Institute of Technology, Dept. of Electrical Engineering and Computer S...
Thesis (Sc. D.)--Massachusetts Institute of Technology, Dept. of Electrical Engineering and Computer...
Thesis (S.B. and M.Eng.)--Massachusetts Institute of Technology, Dept. of Electrical Engineering and...
The optimal conditions to print the 0.13 mu m line and space are presented for newly constructed x-r...
Image resolution in x-ray proximity printing is influenced by diffraction, photo and Auger electron ...
Grating based X-ray phase contrast imaging sets out to overcome the limits of conventional X-ray ima...
The current paper is concerned on one of the most important branch of medical picture modality...
Thesis (Ph. D.)--Massachusetts Institute of Technology, Dept. of Electrical Engineering and Computer...
Thesis (Ph. D.)--Massachusetts Institute of Technology, Dept. of Electrical Engineering and Computer...
This paper proposes the use of a genetic algorithm to optimize mask and illumination geometries in o...
This paper illustrates the use of genetic algorithms (GA) in optimizing mask and illumination source...
Lithography simulation has become an indispensable tool for understanding and optimization of lithog...
10.1088/0022-3727/32/22/102Journal of Physics D: Applied Physics3222L114-L118JPAP
Thesis (Ph. D.)--Massachusetts Institute of Technology, Dept. of Electrical Engineering and Computer...