Ask
Search
My library
ORKG

ORKG Ask

Our mission is to organize scholarly knowledge and make it accessible to humans and machines.

About

About ORKG Ask
Report issue
Statistics
Contact

Legal

Terms of use
Data protection (sheet)
Imprint
Accessibility
License

Technical

We
open source
System status
Changelog
Frontend: v1.41.0
Backend: v1.13.4

We use cookies to provide a better user experience.

Data Protection

Microfabricated silicon electric mechanisms

Mehregany, Mehran

Publication date

January 1990

Publisher

Massachusetts Institute of Technology

Abstract

Thesis (Ph. D.)--Massachusetts Institute of Technology, Dept. of Electrical Engineering and Computer Science, 1990.Includes bibliographical references (leaves 151-156).by Mehran Mehregany.Ph.D

Extracted data

Related items

Extreme-submicrometer silicon-on-insulator (SOI) MOSFETs

Su, Lisa T. (Lisa Tzu-Feng)

January 1994

Thesis (Ph. D.)--Massachusetts Institute of Technology, Dept. of Electrical Engineering and Computer...

Development of a microfabricated silicon motor-driven compression system

Fréchette, Luc G. (Luc Guy)

January 2000

Thesis (Ph.D.)--Massachusetts Institute of Technology, Dept. of Aeronautics and Astronautics, 2000.I...

Manufacture of microparticles for use in eletrophoretic displays

Albert, Jonathan D. (Jonathan Daniel)

January 1997

Thesis (B.S.)--Massachusetts Institute of Technology, Dept. of Mechanical Engineering, 1997.Includes...

Design and fabrication of a microelectromechanical relay

Liemke, Hans-Georg

January 1994

Thesis (B.S.)--Massachusetts Institute of Technology, Dept. of Mechanical Engineering, 1994.Includes...

A micromechanical silicon oscillating accelerometer

Gibbons, Kevin A. (Kevin Augustine)

January 1997

Thesis (M.S.)--Massachusetts Institute of Technology, Dept. of Mechanical Engineering, 1997.Includes...

Laser microchemical etching of silicon

Bloomstein, Theodore Michael

January 1996

Thesis (Sc. D.)--Massachusetts Institute of Technology, Dept. of Electrical Engineering and Computer...

Macro-modeling of micro-electrical-mechanical system devices

Wang, Qiutao.

January 1998

Thesis (S.M.)--Massachusetts Institute of Technology, Dept. of Mechanical Engineering, 1998.Includes...

A remotely automated microscope for characterizing micro electromechanical systems (MEMS)

Seth, Danny, 1978-

January 2001

Thesis (S.M.)--Massachusetts Institute of Technology, Dept. of Electrical Engineering and Computer S...

Electrostatically actuated microelectromechanical test structures for material property measurement

Osterberg, Peter Maynard

January 1995

Thesis (Ph. D.)--Massachusetts Institute of Technology, Dept. of Electrical Engineering and Computer...

Integrated silicon pressure sensors using wafer bonding technology

Parameswaran, Lalitha

January 1997

Thesis (Ph. D.)--Massachusetts Institute of Technology, Dept. of Electrical Engineering and Computer...

Precision machine design for the semiconductor equipment manufacturing industry

Van Doren, Matthew J., 1967-

January 1995

Thesis (Ph. D.)--Massachusetts Institute of Technology, Dept. of Mechanical Engineering, 1995.Vita.I...

Novel etch-stop materials for silicon micromachining

Wu, Kenneth Chu-Chao

January 1997

Thesis (S.M.)--Massachusetts Institute of Technology, Dept. of Materials Science and Engineering, 19...

Fabrication and electrical characterization of BESOI

Bhat, Mousumi

January 1991

Thesis (M.S.)--Massachusetts Institute of Technology, Dept. of Electrical Engineering and Computer S...

Piezoelectric ultrasonic micromotors

Flynn, Anita M

January 1995

Thesis (Ph. D.)--Massachusetts Institute of Technology, Dept. of Electrical Engineering and Computer...

Silicon Germanium hole mobility and effective mass

Tanasa, Corina E. (Corina Elena), 1976-

January 2002

Thesis (S.M.)--Massachusetts Institute of Technology, Dept. of Electrical Engineering and Computer S...

Extreme-submicrometer silicon-on-insulator (SOI) MOSFETs

Su, Lisa T. (Lisa Tzu-Feng)

January 1994

Thesis (Ph. D.)--Massachusetts Institute of Technology, Dept. of Electrical Engineering and Computer...

Development of a microfabricated silicon motor-driven compression system

Fréchette, Luc G. (Luc Guy)

January 2000

Thesis (Ph.D.)--Massachusetts Institute of Technology, Dept. of Aeronautics and Astronautics, 2000.I...

Manufacture of microparticles for use in eletrophoretic displays

Albert, Jonathan D. (Jonathan Daniel)

January 1997

Thesis (B.S.)--Massachusetts Institute of Technology, Dept. of Mechanical Engineering, 1997.Includes...

Design and fabrication of a microelectromechanical relay

Liemke, Hans-Georg

January 1994

Thesis (B.S.)--Massachusetts Institute of Technology, Dept. of Mechanical Engineering, 1994.Includes...

A micromechanical silicon oscillating accelerometer

Gibbons, Kevin A. (Kevin Augustine)

January 1997

Thesis (M.S.)--Massachusetts Institute of Technology, Dept. of Mechanical Engineering, 1997.Includes...

Laser microchemical etching of silicon

Bloomstein, Theodore Michael

January 1996

Thesis (Sc. D.)--Massachusetts Institute of Technology, Dept. of Electrical Engineering and Computer...

Macro-modeling of micro-electrical-mechanical system devices

Wang, Qiutao.

January 1998

Thesis (S.M.)--Massachusetts Institute of Technology, Dept. of Mechanical Engineering, 1998.Includes...

A remotely automated microscope for characterizing micro electromechanical systems (MEMS)

Seth, Danny, 1978-

January 2001

Thesis (S.M.)--Massachusetts Institute of Technology, Dept. of Electrical Engineering and Computer S...

Electrostatically actuated microelectromechanical test structures for material property measurement

Osterberg, Peter Maynard

January 1995

Thesis (Ph. D.)--Massachusetts Institute of Technology, Dept. of Electrical Engineering and Computer...

Integrated silicon pressure sensors using wafer bonding technology

Parameswaran, Lalitha

January 1997

Thesis (Ph. D.)--Massachusetts Institute of Technology, Dept. of Electrical Engineering and Computer...

Precision machine design for the semiconductor equipment manufacturing industry

Van Doren, Matthew J., 1967-

January 1995

Thesis (Ph. D.)--Massachusetts Institute of Technology, Dept. of Mechanical Engineering, 1995.Vita.I...

Novel etch-stop materials for silicon micromachining

Wu, Kenneth Chu-Chao

January 1997

Thesis (S.M.)--Massachusetts Institute of Technology, Dept. of Materials Science and Engineering, 19...

Fabrication and electrical characterization of BESOI

Bhat, Mousumi

January 1991

Thesis (M.S.)--Massachusetts Institute of Technology, Dept. of Electrical Engineering and Computer S...

Piezoelectric ultrasonic micromotors

Flynn, Anita M

January 1995

Thesis (Ph. D.)--Massachusetts Institute of Technology, Dept. of Electrical Engineering and Computer...

Silicon Germanium hole mobility and effective mass

Tanasa, Corina E. (Corina Elena), 1976-

January 2002

Thesis (S.M.)--Massachusetts Institute of Technology, Dept. of Electrical Engineering and Computer S...

Extreme-submicrometer silicon-on-insulator (SOI) MOSFETs

Su, Lisa T. (Lisa Tzu-Feng)

January 1994

Thesis (Ph. D.)--Massachusetts Institute of Technology, Dept. of Electrical Engineering and Computer...

Development of a microfabricated silicon motor-driven compression system

Fréchette, Luc G. (Luc Guy)

January 2000

Thesis (Ph.D.)--Massachusetts Institute of Technology, Dept. of Aeronautics and Astronautics, 2000.I...

Manufacture of microparticles for use in eletrophoretic displays

Albert, Jonathan D. (Jonathan Daniel)

January 1997

Thesis (B.S.)--Massachusetts Institute of Technology, Dept. of Mechanical Engineering, 1997.Includes...