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Kinetic studies on the nucleation and growth of silicon via chemical vapour deposition

Claassen, W.A.P.

Publication date

January 1981

Publisher

[S.l. : s.n.]

Abstract

Contains fulltext : mmubn000001_026768747.pdf (publisher's version ) (Open Access)Promotor : J. Bloem[10], 170 p

Extracted data

Topics

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