Polishing characteristics and mechanism in magnetorheological planarization using a permanent magnetic yoke with translational movement

Translational movement was integrated into a magnetorheological planarization process that uses a permanent magnet yoke with a straight air gap as magnetic source in order to improve surface planarity. The effects of the process conditions, including stroke and velocity of the translational movement, work and excitation gaps and concentration of carbonyl iron particles, on the polishing forces, surface roughness and volumetric removal rate were systematically investigated. The results showed that translational movement had insignificant effect on the polished surface finish, but considerably improved the surface planarity. The surface quality and volumetric removal rate were found to be affected by carbonyl iron particles concentration, and work and excitation gaps. Based on the parametric study, theoretical and empirical models were established for predicting the polishing forces, surface roughness and volumetric removal rate in this magnetorheological process