Add to ORKGThe structure and composition of multilayered SiNx structures prepared by low pressure chemical vapour deposition were studied by cross-sectional transmission electron microscopy and spectroscopic ellipsometry. Using appropriate deposition parameters and post deposition annealing, well separated Si nanocrystals were obtained with avarage grain size of 8-10 nm
Si nanocrystals (NCs) are often prepared by thermal annealing of multiple stacks of alternating sub-...
Multilayers consisting of silicon nanocrystals (Si NCs) and SiO2 are successfully fabricated by elec...
Size controlled silicon nanocrystals (SiNC) in silicon oxynitride matrix were prepared using plasma ...
International audienceSilicon nanocrystals have been produced by thermal annealing of SiNx thin film...
International audienceSilicon nanocrystals have been produced by thermal annealing of SiNx thin film...
Superlattices containing 3 nm thick silicon rich silicon nitride sublayers and 3 nm and 10 nm thick ...
International audienceSilicon nanocrystals (Si-ncs) embedded in silicon nitride are of great interes...
International audienceSilicon nanocrystals (Si-ncs) embedded in silicon nitride are of great interes...
Nanostructures of SiNx were made by bombardment of ionized N2 on Si surfaceand subsequent annealing....
Semiconductor nanocrystals in dielectric films are interesting from fundamental aspect, because quan...
This paper reports the growth of silicon nanocrystals (SiNCs) from SiH4-O-2 plasma chemistry. The fo...
Superlattices of Si3N4 and Si-rich silicon nitride thin layers with varying thickness were prepared ...
Silicon nanocrystals (Si-nc) embedded in SiO2 matrix have been prepared by high temperature thermal ...
Silicon nanocrystals (Si-nc) embedded in SiO2 matrix have been prepared by high temperature thermal ...
Silicon nanocrystals (Si-nc) embedded in SiO2 matrix have been prepared by high temperature thermal ...
Si nanocrystals (NCs) are often prepared by thermal annealing of multiple stacks of alternating sub-...
Multilayers consisting of silicon nanocrystals (Si NCs) and SiO2 are successfully fabricated by elec...
Size controlled silicon nanocrystals (SiNC) in silicon oxynitride matrix were prepared using plasma ...
International audienceSilicon nanocrystals have been produced by thermal annealing of SiNx thin film...
International audienceSilicon nanocrystals have been produced by thermal annealing of SiNx thin film...
Superlattices containing 3 nm thick silicon rich silicon nitride sublayers and 3 nm and 10 nm thick ...
International audienceSilicon nanocrystals (Si-ncs) embedded in silicon nitride are of great interes...
International audienceSilicon nanocrystals (Si-ncs) embedded in silicon nitride are of great interes...
Nanostructures of SiNx were made by bombardment of ionized N2 on Si surfaceand subsequent annealing....
Semiconductor nanocrystals in dielectric films are interesting from fundamental aspect, because quan...
This paper reports the growth of silicon nanocrystals (SiNCs) from SiH4-O-2 plasma chemistry. The fo...
Superlattices of Si3N4 and Si-rich silicon nitride thin layers with varying thickness were prepared ...
Silicon nanocrystals (Si-nc) embedded in SiO2 matrix have been prepared by high temperature thermal ...
Silicon nanocrystals (Si-nc) embedded in SiO2 matrix have been prepared by high temperature thermal ...
Silicon nanocrystals (Si-nc) embedded in SiO2 matrix have been prepared by high temperature thermal ...
Si nanocrystals (NCs) are often prepared by thermal annealing of multiple stacks of alternating sub-...
Multilayers consisting of silicon nanocrystals (Si NCs) and SiO2 are successfully fabricated by elec...
Size controlled silicon nanocrystals (SiNC) in silicon oxynitride matrix were prepared using plasma ...