Fast electrochemical membrane actuator: Design, fabrication and preliminary testing

An actuator based on water electrolysis with a fast change of voltage polarity is presented. It demonstrates a new actuation principle allowing significant increase the operation frequency of the device due to fast termination of the produced gas. The actuator consists of a working chamber with metallic electrodes and supplying channels filled with an electrolyte. The chamber is formed in a layer of SU-8 and covered by a flexible polydimethylsiloxane membrane, which deforms as the pressure in the chamber increases. Design, fabrication procedure, and first tests of the actuator are described