Add to ORKGThe feasibility of Union Carbide's silane process for commercial application was established. An integrated process design for an experimental process system development unit and a commercial facility were developed. The corresponding commercial plant economic performance was then estimated
The goal of the Low Cost Silicon Process Development project is to determine technical and economic ...
Prepared for Jet Propulsion Laboratory, California Institute of Technology under contract no. NAS-7-...
Progress on the design, production, and testing of a prototype chemical reactor for silicon producti...
The commercial production of low-cost semiconductor-grade silicon is an essential requirement of the...
The overall objective of the LSA Silicon Material Task is to establish a chemical process for produc...
The purpose of this program is to establish the practicality of a process for the high volume, low c...
Cover title.Quarterly progress report, period covered: January-March 1977.Work performed under contr...
Includes bibliographical references.Quarterly progress report, January-March 1978.Work performed und...
Silane produced via the redistribution of dichlorosilane and purified by distillation followed by ad...
It was recognized that the traditional hot rod type deposition process for decomposing silane is ene...
Analysis of process system properties was continued for silicon source materials under consideration...
This 18 month contract is intended to research and develop an innovative method of low cost silicon ...
Technical activities are reported in the design of process, facilities, and equipment for producing ...
The kinetics of the redistribution of dichlorosilane and trichlorosilane vapor over a tertiary amine...
The Silicon Material Task of the Flat-Plate Solar Array Project was assigned the objective of develo...
The goal of the Low Cost Silicon Process Development project is to determine technical and economic ...
Prepared for Jet Propulsion Laboratory, California Institute of Technology under contract no. NAS-7-...
Progress on the design, production, and testing of a prototype chemical reactor for silicon producti...
The commercial production of low-cost semiconductor-grade silicon is an essential requirement of the...
The overall objective of the LSA Silicon Material Task is to establish a chemical process for produc...
The purpose of this program is to establish the practicality of a process for the high volume, low c...
Cover title.Quarterly progress report, period covered: January-March 1977.Work performed under contr...
Includes bibliographical references.Quarterly progress report, January-March 1978.Work performed und...
Silane produced via the redistribution of dichlorosilane and purified by distillation followed by ad...
It was recognized that the traditional hot rod type deposition process for decomposing silane is ene...
Analysis of process system properties was continued for silicon source materials under consideration...
This 18 month contract is intended to research and develop an innovative method of low cost silicon ...
Technical activities are reported in the design of process, facilities, and equipment for producing ...
The kinetics of the redistribution of dichlorosilane and trichlorosilane vapor over a tertiary amine...
The Silicon Material Task of the Flat-Plate Solar Array Project was assigned the objective of develo...
The goal of the Low Cost Silicon Process Development project is to determine technical and economic ...
Prepared for Jet Propulsion Laboratory, California Institute of Technology under contract no. NAS-7-...
Progress on the design, production, and testing of a prototype chemical reactor for silicon producti...