We have fabricated a variety of micro-optic components including Fresnel and non-Frensel lenses, off-axis and dispersive lenses with binary stepped contours, and analog contours. Process details for all lens designs fabricated are given including multistep photolithography for binary fabrication and grayscale mask photolithography for analog fabrication. Reactive ion etching and ion beam milling are described for the binary fabrication process, while ion beam milling was used for the analog fabrication process. Examples of micro-optic components fabricated in both Si and CdTe substrates are given
1-D, 2-D, 3-D microstructures with lateral dimensions at the scale of the wavelength of light can be...
Through advances in semiconductor miniaturization technology, microrelief patterns, with characteris...
1-D, 2-D, 3-D microstructures with lateral dimensions at the scale of the wavelength of light can be...
As imaging and photonics technology is advancing to smaller and complex devices there is increasing ...
To date, there have been many techniques used to generate micro-optic structures in glass or other m...
A process for the fabrication of binary optics at the Rochester Institute of Technology was establis...
As imaging and photonics technology is advancing to smaller and complex devices there is increasing ...
A process for the fabrication of binary optics at the Rochester Institute of Technology was establis...
Binary optics were fabricated by an ion-beam sputter deposition technique on different substrate mat...
Abstract. This paper describes the results of nearly a decade of work undertaken at GEC-Marconi Infr...
The current generation of electro-optical sensors utilizing refractive and reflective optical elemen...
Blazed Fresnel zone microlens arrays were fabricated by ion-beam-sputter deposition technique on dif...
Micro-optical systems, that utilize multiple channels for imaging instead of a single one, are frequ...
MEMS (micro-electro-mechanical system) technology is an established field, which makes use of the ad...
1-D, 2-D, 3-D microstructures with lateral dimensions at the scale of the wavelength of light can be...
1-D, 2-D, 3-D microstructures with lateral dimensions at the scale of the wavelength of light can be...
Through advances in semiconductor miniaturization technology, microrelief patterns, with characteris...
1-D, 2-D, 3-D microstructures with lateral dimensions at the scale of the wavelength of light can be...
As imaging and photonics technology is advancing to smaller and complex devices there is increasing ...
To date, there have been many techniques used to generate micro-optic structures in glass or other m...
A process for the fabrication of binary optics at the Rochester Institute of Technology was establis...
As imaging and photonics technology is advancing to smaller and complex devices there is increasing ...
A process for the fabrication of binary optics at the Rochester Institute of Technology was establis...
Binary optics were fabricated by an ion-beam sputter deposition technique on different substrate mat...
Abstract. This paper describes the results of nearly a decade of work undertaken at GEC-Marconi Infr...
The current generation of electro-optical sensors utilizing refractive and reflective optical elemen...
Blazed Fresnel zone microlens arrays were fabricated by ion-beam-sputter deposition technique on dif...
Micro-optical systems, that utilize multiple channels for imaging instead of a single one, are frequ...
MEMS (micro-electro-mechanical system) technology is an established field, which makes use of the ad...
1-D, 2-D, 3-D microstructures with lateral dimensions at the scale of the wavelength of light can be...
1-D, 2-D, 3-D microstructures with lateral dimensions at the scale of the wavelength of light can be...
Through advances in semiconductor miniaturization technology, microrelief patterns, with characteris...
1-D, 2-D, 3-D microstructures with lateral dimensions at the scale of the wavelength of light can be...