Micromachining is a chemical means of etching three-dimensional structures, typically in single-crystalline silicon. These techniques are leading toward what is coming to be referred to as MEMS (micro electro mechanical systems), where in addition to the ordinary two dimensional (planar) microelectronics, it is possible to build three-dimensional micromotors, electrically-actuated microvalves, hydraulic systems, and much more on the same microchip. These techniques become possible because of differential etching rates of various crystallographic planes and materials used for semiconductor microfabrication. The University of Cincinnati group in collaboration with NASA Lewis formed micro heat pipes in silicon by the above techniques. Work is ...
In context of a European Commission funded project, development of a standardized multifunctional st...
A micro heat pipe, formed in a semiconductor substrate, carries heat from a region of heat flux in t...
Throughout the history of electronics, technology has been driven by shrinking devices and increasin...
Micro-electro-mechanical systems (MEMS)-based micro-heat pipes, as a novel heat pipe technology, is ...
Due to the character of the original source materials and the nature of batch digitization, quality ...
[[abstract]]This paper describes the development of radial grooved micro heat pipes (MHPs) with a th...
As the electronic components get more and more miniaturized, their thermal management becomes more a...
An issue of concern with the recent densification of electrical components in integrated circuits is...
Today the thermal losses of power electronic devices increase at the same time with the decreasingof...
The performance of a specially fabricated micro heat pipe etched on a silicon wafer is analyzed to e...
Some of the advanced thermal management techniques used to reduce operating junction temperature und...
ABSTRACT The cooling capacity of a micro heat pipe is mainly governed by the magnitude of capillary ...
Cataloged from PDF version of thesis.Includes bibliographical references (leaves 71-76).Thesis (M.S....
The authors have developed a new type of heat spreader based on the integration of heat pipes direct...
This thesis explores the employment of monocrystalline silicon in microsystems as an active material...
In context of a European Commission funded project, development of a standardized multifunctional st...
A micro heat pipe, formed in a semiconductor substrate, carries heat from a region of heat flux in t...
Throughout the history of electronics, technology has been driven by shrinking devices and increasin...
Micro-electro-mechanical systems (MEMS)-based micro-heat pipes, as a novel heat pipe technology, is ...
Due to the character of the original source materials and the nature of batch digitization, quality ...
[[abstract]]This paper describes the development of radial grooved micro heat pipes (MHPs) with a th...
As the electronic components get more and more miniaturized, their thermal management becomes more a...
An issue of concern with the recent densification of electrical components in integrated circuits is...
Today the thermal losses of power electronic devices increase at the same time with the decreasingof...
The performance of a specially fabricated micro heat pipe etched on a silicon wafer is analyzed to e...
Some of the advanced thermal management techniques used to reduce operating junction temperature und...
ABSTRACT The cooling capacity of a micro heat pipe is mainly governed by the magnitude of capillary ...
Cataloged from PDF version of thesis.Includes bibliographical references (leaves 71-76).Thesis (M.S....
The authors have developed a new type of heat spreader based on the integration of heat pipes direct...
This thesis explores the employment of monocrystalline silicon in microsystems as an active material...
In context of a European Commission funded project, development of a standardized multifunctional st...
A micro heat pipe, formed in a semiconductor substrate, carries heat from a region of heat flux in t...
Throughout the history of electronics, technology has been driven by shrinking devices and increasin...