Synthesis, structure and applications of amorphous diamond

The relation was investigated between the compressive stress, the substrate temperature and the microstructure of amorphous carbon films deposited from the plasma stream of a cathodic vacuum arc with a curved magnetic filter. A pressure-temperature phase diagram is presented in which the results of a number of depositions at various substrate bias levels and temperatures are plotted. The microstructure of each film was determined by electron energy loss spectroscopy and electron diffraction