High Quality Carbon Nanotubes on Conductive Substrates Grown at Low Temperatures
- Ahmad, Muhammad
- Anguita, Jose
- Stolojan, Vlad
- Corless, T
- Chen, J
- Carey, James
- Silva, S
DOIAbstract
For carbon nanotubes (CNTs) to be exploited in electronic applications, the growth of high quality material on conductive substrates at low temperatures (<450°C) is required. CNT quality is known to be strongly degraded when growth is conducted on metallic surfaces, particularly at low temperatures using conventional chemical vapor deposition (CVD). Here, the production of high quality vertically-aligned CNTs at low substrate temperatures (350–440°C) on conductive TiN thin film using photo-thermal CVD is demonstrated by confining the energy required for growth to just the catalyst using an array of optical lamps and by optimizing the thickness of the TiN under-layer. The thickness of the TiN plays a crucial role in determining various prope...