A piezoelectric resonator device includes: a top electrode layer with a patterned structure, a top piezoelectric layer adjacent to the top layer, a middle metal layer adjacent to the top piezoelectric layer opposite the top layer, a bottom piezoelectric layer adjacent to the middle layer opposite the top piezoelectric layer, and a bottom electrode layer with a patterned structure and adjacent to the bottom piezoelectric layer opposite the middle layer. The top layer includes a first plurality of electrodes inter-digitated with a second plurality of electrodes. A first one of the electrodes in the top layer and a first one of the electrodes in the bottom layer are coupled to a first contact, and a second one of the electrodes in the top laye...
Disclosed are micromechanical resonator apparatus having features that permit multiple resonators on...
An acoustic wave filter device is disclosed. The device includes an acoustic wave filter element, an...
A vibration sensor includes a substrate. A first electrical contact and a spaced apart second electr...
Microelectromechanical resonators include a resonator body having a first piezoelectric layer on a u...
An acoustic wave resonator device comprising a resonant layer that comprises a series of side-by-sid...
A piezoelectrically transduced resonator device includes a wafer having a substrate, a buried oxide ...
Piezoelectric resonator has an electrode region applied on the surface of the resonator and a counte...
An electrical device includes an insulating substrate; an elongated piezoelectric semiconductor stru...
DE 102006025362 A1 UPAB: 20080107 NOVELTY - The fully active piezo actuator (1) has multiple piezoel...
A piezoelectric resonator is disclosed. In one embodiment the piezoelectric resonator includes a res...
This article presents a numerical model for a piezoelectric actuator. This model estimates the layer...
An electric power generator includes a first conductive layer, a plurality of semiconducting piezoel...
Acoustic wave devices are disclosed. The devices include a substrate, a bi-layer reflector and an ac...
The invention discloses a tuneable resonator (100, 200, 300, 500, 600, 700, 900) with a substrate la...
Disclosed are micromechanical resonator apparatus having features that permit multiple resonators on...
Disclosed are micromechanical resonator apparatus having features that permit multiple resonators on...
An acoustic wave filter device is disclosed. The device includes an acoustic wave filter element, an...
A vibration sensor includes a substrate. A first electrical contact and a spaced apart second electr...
Microelectromechanical resonators include a resonator body having a first piezoelectric layer on a u...
An acoustic wave resonator device comprising a resonant layer that comprises a series of side-by-sid...
A piezoelectrically transduced resonator device includes a wafer having a substrate, a buried oxide ...
Piezoelectric resonator has an electrode region applied on the surface of the resonator and a counte...
An electrical device includes an insulating substrate; an elongated piezoelectric semiconductor stru...
DE 102006025362 A1 UPAB: 20080107 NOVELTY - The fully active piezo actuator (1) has multiple piezoel...
A piezoelectric resonator is disclosed. In one embodiment the piezoelectric resonator includes a res...
This article presents a numerical model for a piezoelectric actuator. This model estimates the layer...
An electric power generator includes a first conductive layer, a plurality of semiconducting piezoel...
Acoustic wave devices are disclosed. The devices include a substrate, a bi-layer reflector and an ac...
The invention discloses a tuneable resonator (100, 200, 300, 500, 600, 700, 900) with a substrate la...
Disclosed are micromechanical resonator apparatus having features that permit multiple resonators on...
Disclosed are micromechanical resonator apparatus having features that permit multiple resonators on...
An acoustic wave filter device is disclosed. The device includes an acoustic wave filter element, an...
A vibration sensor includes a substrate. A first electrical contact and a spaced apart second electr...