Add to ORKGA floating element shear sensor and method for fabricating the same are provided. According to an embodiment, a microelectromechanical systems (MEMS)-based capacitive floating element shear stress sensor is provided that can achieve time-resolved turbulence measurement. In one embodiment, a differential capacitive transduction scheme is used for shear stress measurement. The floating element structure for the differential capacitive transduction scheme incorporates inter digitated comb fingers forming differential capacitors, which provide electrical output proportional to the floating element deflection
AbstractThe purpose of this paper is to propose two types of wall shear stress sensor based on MEMS-...
A micro-floating element wall shear stress sensor with backside connections has been developed for a...
A piezoelectric sensor with a floating element was developed for direct measurement of flow induced ...
A microelectromechanical systems (MEMS)-based capacitive floating element shear stress sensor, devel...
A silicon-based micromachined, floating-element sensor for low-magnitude wall shear-stress measureme...
A device developed for the direct measurement of wall shear stress generated by flows is described. ...
A micromachined floating element array sensor was designed, fabricated, and characterized. The senso...
By applying the micro-electro-mechanical-system (MEMS) fabrication technology, we developed a micro-...
In this thesis we report on a new micromachined floating-element shear-stress sensor for turbulent b...
A new MEMS shear stress sensor imager has been developed and its capability of imaging surface shear...
This paper reports the successful development of the first IC-integrated flexible MEMS shear-stress ...
In this work, the design, simulation, fabrication, and characterization of a shear stress sensor bas...
Microhot-film shear-stress sensors have been developed by using surface micromachining techniques. T...
A micro sized multi-axis semiconductor skin friction/wall shear stress induced by fluid flow. The se...
In this thesis we report on a new micromachined floating-element shear-stress sensor for turbulent ...
AbstractThe purpose of this paper is to propose two types of wall shear stress sensor based on MEMS-...
A micro-floating element wall shear stress sensor with backside connections has been developed for a...
A piezoelectric sensor with a floating element was developed for direct measurement of flow induced ...
A microelectromechanical systems (MEMS)-based capacitive floating element shear stress sensor, devel...
A silicon-based micromachined, floating-element sensor for low-magnitude wall shear-stress measureme...
A device developed for the direct measurement of wall shear stress generated by flows is described. ...
A micromachined floating element array sensor was designed, fabricated, and characterized. The senso...
By applying the micro-electro-mechanical-system (MEMS) fabrication technology, we developed a micro-...
In this thesis we report on a new micromachined floating-element shear-stress sensor for turbulent b...
A new MEMS shear stress sensor imager has been developed and its capability of imaging surface shear...
This paper reports the successful development of the first IC-integrated flexible MEMS shear-stress ...
In this work, the design, simulation, fabrication, and characterization of a shear stress sensor bas...
Microhot-film shear-stress sensors have been developed by using surface micromachining techniques. T...
A micro sized multi-axis semiconductor skin friction/wall shear stress induced by fluid flow. The se...
In this thesis we report on a new micromachined floating-element shear-stress sensor for turbulent ...
AbstractThe purpose of this paper is to propose two types of wall shear stress sensor based on MEMS-...
A micro-floating element wall shear stress sensor with backside connections has been developed for a...
A piezoelectric sensor with a floating element was developed for direct measurement of flow induced ...