Design and control of a 6-Degree-of-Freedom levitated positioner with high precision

This dissertation presents a high-precision positioner with a novel superimposed concentrated-field permanent-magnet matrix. This extended-range multi-axis positioner can generate all 6-DOF (degree-of-freedom) motions with only a single moving part. It is actuated by three planar levitation motors, which are attached on the bottom of the moving part. Three aerostatic bearings are used to provide the suspension force against the gravity for the system. The dynamic model of the system is developed and analyzed. And several control techniques including SISO (single input and single output) and MIMO (multi inputs and multi outputs) controls are discussed in the dissertation. The positioner demonstrates a position resolution of 20 nm and position noise of 10 nm rms in x and y and 15 nm rms in z. The angular resolution around the x-, y-, and z-axes is in sub-microradian order. The planar travel range is 160 mm ?? 160 mm, and the maximum velocity achieved is 0.5 m/s at a 5-m/s2 acceleration, which can enhance the throughput in precision manufacturing. Various experimental results are presented in this dissertation to demonstrate the positioner??s capability of accurately tracking any planar trajectories. Those experimental results verified the potential utility of this 6-DOF high-precision positioner in precision manufacturing and factory automation