Development of a 6-degree-of-freedom magnetically levitated instrument with nanometer precision

This thesis presents the design and fabrication of a novel magnetically levitated (maglev) device with six-degree-of-freedom motion capability at nanometer precision. The applications of this device are manufacture of nanoscale structures, assembly of microparts, vibration isolation of delicate instrumentation, and telerobotics. In this thesis, a single-moving stage is levitated by six maglev actuators. The total mass of the moving stage is 0.2126 kg. Three laser interferometers and three capacitance sensors are used to gather the position information. User interface and real-time control routines are implemented digitally on a VME PC and a digital-signal-processor (DSP) board. The underlying mechanical design and fabrication, electrical system setup, control system design, noise analysis, and test results are presented in this thesis. Test results show a quick step response in all six axes and a resolution of 2.5 nm rms in horizontal motion and 25 nm rms in vertical motion