3D Multi-Subband Ensemble Monte Carlo Simulator of FinFETs and nanowire transistors

In this paper we present the development of a 3D Multi Subband Ensemble Monte Carlo (3DMSB-EMC) tool targeting the simulation of nanoscaled FinFETs and nanowire transistors. In order to deliver computational efficiency, we have developed a self-consistent framework that couples a MSB- EMC transport engine for a 1D electron gas with a 3DPoisson- 2DSchro ̈dinger solver. Here we use a FinFET with a physical channel length of 15nm as an example to demonstrate the appli- cability and highlight the benefits of the simulation framework. A comparison of the 3DMSB-EMC with Non-Equilibrium Green’s Functions (NEGFs) in the ballistic limit is used to verify and validate our approach