Rapid Depth Profiling via High Irradiance Laser Ionization Orthogonal Time-of-Flight Mass Spectrometry

National Natural Science Foundation of China [21027011]As a relatively new technique, high irradiance laser (4.5 ns, 532 nm, 9x10(9) W/cm(2)) ionization orthogonal time-of-flight mass spectrometry (LI-O-TOFMS) has been applied for depth profile analysis of various coated samples as well as element determination with respect to depth in solid samples. This technique is capable of performing depth profiling of coated layer with a thicknesses from sub-micrometer to tens micrometer scale; and can examine samples with monolayer and multilayer coated. Compared with other analytical techniques, LI-O-TOFMS is a versatile analytical tool in rapid depth profiling of coated samples