Er–Doped Dielectric Films by Radiofrequency Magnetron Co–Sputtering

The current development of high speed optical communication systems needs devices such as waveguide optical amplifiers. At this regard, erbium-doped silicate glasses are potential candidates for active planar waveguides [1 and refs. therein]. Er3+ ions, the usual cationic form for this rare–earth when embedded in glass, are really promising due to the possible radiative emission at 1.54 microns, which is quite matching one of the standard telecommunication wavelengths. Other materials such as alumina can be used for obtaining waveguides to integrate in a glass fiber system. Er:SiO2– and Er:Al2O3–based devices offer a broad emission line width, that can be useful for amplification over a wide wavelength range