Add to ORKGThere the structural-production base of microelectronics has been analysed; it was showed that this base of CMOS has most advantage to develop the microelectronic pick-offs. The simulator of two-flow CMOS of magnetotransistor has been developed and has been verified by experiment. The mechanisms of change of magnetosensitivity of developed sensors depending on the temperature and operation modes have been determined. The constructions and the manufacturing methods of pick-offs of hydrogen and pressure have been developed.Available from VNTIC / VNTIC - Scientific & Technical Information Centre of RussiaSIGLERURussian Federatio
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The fabrication and characterization of a magnetic micro sensor (MMS) with two magnetic field effect...
The purpose of the work: the development and complex investigation of the constructions and methods ...
The investigation of the influence of formation processes of separation boundaries of multilayer str...
Experimental results are presented for the comparison of a novel CMOS based magnetic sensor and a la...
In paper it is shown that acceleration of sensors production rates requires design process automatio...
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The report presents the results of work on the development and manufacturing technology of integrate...
A synthesis on semiconductor magnetic sensors based on the concentration of charge carriers by a mag...
Micro magnetic field (MMF) sensors developed employing complementary metal oxide semiconductor (CMOS...
An overview of the major sensor and actuator projects using the micromachining capabilities of the M...
This paper reviews CMOS (complementary metal-oxide-semiconductor) MEMS (micro-electro-mechanical sys...
The report presents the results of research and development on the design and manufacturing technolo...
The paper presents results on research and optimization on the basis of device-technological modelin...
A description of a three-level mechanical polysilicon surface-micromachining technology including a ...
In this thesis, sensors are described whose fabrication processes are compatible with standard CMOS ...
The fabrication and characterization of a magnetic micro sensor (MMS) with two magnetic field effect...
The purpose of the work: the development and complex investigation of the constructions and methods ...
The investigation of the influence of formation processes of separation boundaries of multilayer str...
Experimental results are presented for the comparison of a novel CMOS based magnetic sensor and a la...
In paper it is shown that acceleration of sensors production rates requires design process automatio...
This study investigates the design and fabrication of magnetic microsensors using the commercial 0.3...
The report presents the results of work on the development and manufacturing technology of integrate...
A synthesis on semiconductor magnetic sensors based on the concentration of charge carriers by a mag...
Micro magnetic field (MMF) sensors developed employing complementary metal oxide semiconductor (CMOS...
An overview of the major sensor and actuator projects using the micromachining capabilities of the M...
This paper reviews CMOS (complementary metal-oxide-semiconductor) MEMS (micro-electro-mechanical sys...
The report presents the results of research and development on the design and manufacturing technolo...
The paper presents results on research and optimization on the basis of device-technological modelin...
A description of a three-level mechanical polysilicon surface-micromachining technology including a ...
In this thesis, sensors are described whose fabrication processes are compatible with standard CMOS ...
The fabrication and characterization of a magnetic micro sensor (MMS) with two magnetic field effect...