Kombinierter Einsatz von Gassensoren verschiedener Technologien (KOMBISENS). Entwicklung und Einsatz von Gassensorsystemen und gassensorspezifischer Mikrocontroller auf Siliziumbasis Abschlussbericht

Multi gas sensor systems are often the only way for increasing selectivity of a gas measurement in a given environment. For hand held devices low power consumption of these devices is necessary. On the other hand it is known that the cycled heating of gas sensors give the possibility for quantitative analysis of gas mixtures. Using silicon technology together with micromachining for sensor fabrication these requirements can be achieved in a very flexible way. In this part of the project we developed a microstructured silicon substrate with four different gas sensors, each placed on a thermally insulated silicon membrane, optimized for cycled heating. As gas sensitive thin films SnO_2, WO_3, Cu-phthalocyanine were deposited with lift-off technique on the different membranes. Sputtered SiO_2 was deposited on the fourth membrane for measuring humidity. (orig.)SIGLEAvailable from TIB Hannover: F97B1260+a / FIZ - Fachinformationszzentrum Karlsruhe / TIB - Technische InformationsbibliothekBundesministerium fuer Bildung, Wissenschaft, Forschung und Technologie, Bonn (Germany)DEGerman