Qualitaetsmanagement fuer neue Produktionskonzepte der Halbleiterfertigung. QM fuer Smart Fabrication Abschlussbericht

Semiconductor industry is faced with ever shorter times to market accompanied by increasing complexity of IC's. Today's concepts to assure quality and reliability rely on testing at a late stage in product development. Such methods become more and more inefficient in terms of costs and time for development of new devices and circuits. Therefore a new methodology in Q and R accessment has to be developed and implemented. Efforts in this direction have been started by different players in semiconductor industry. The reason being that Q and R has become a major aspect of competetiveness and economical success. The project 'Smart Fabrications' is focussed on: failure analysis for Integrated Circuits with reduced feature sizes, highly efficient methods to identify and short out bad IC's (Screening) and for predicting reliability, new concepts for efficient product qualification, means for early identification of process excursions. The individual packages of this project have lead to new methods and tools, that have shown to meet the new demands and to reduce costs: Light Emission Microscopy; Etching for opening micro-windows, a concept for yield-defect-density-correlation HV-Screen and I_D_D_Q-testing is applied in production and partly replaces standart Burn-In; a new concept to access long term reliability of new device generations is used in qualification. Methods to extend qualification to ensure reliability limited by extrinsic defects, a Defect Management Cluster in Reutlingen waferfab. The demands in Q and R will remain high and it is getting harder to predict economical success of innovative products. There is no doubt that the focus of reliability engineering will therefore shift towards the underlying physics-principles, and towards new methods and tools. (orig.)SIGLEAvailable from TIB Hannover: F99B1528+a / FIZ - Fachinformationszzentrum Karlsruhe / TIB - Technische InformationsbibliothekBundesministerium fuer Bildung und Forschung (BMBF), Bonn (Germany)DEGerman