Produktionstechnik fuer bewegliche Mikrostrukturen auf strukturierten Substraten am Beispiel des Beschleunigungssensors. Ergebnisbericht Abschlussbericht

The activities conducted within the framework of the PROBE joint project funded by the German Federal Ministry for Education, Science, Research and Technology were aimed at the development of industrial-scale techniques and facilities for mass production of microcomponents by positioned hot embossing. The main focus thus was not on the development of an absolutely novel product of microsystems technology, but rather on the translation of a laboratory-scale type prototype manufacturing process into a production process to be employed on an industrial scale. Completely new manufacturing concepts for hot embossing of movable microstructures were developed in PROBE which, in addition to adapting laboratory-scale processes to sequences of production steps fit for industrial application, also included the development of new equipment. These facilities were used for manufacturing for the first time in March 1998. The reference product was the LIGA acceleration sensor developed at the Karlsruhe Research Center. (orig.)SIGLEAvailable from TIB Hannover: DtF QN1(74,50) / FIZ - Fachinformationszzentrum Karlsruhe / TIB - Technische InformationsbibliothekBundesministerium fuer Bildung, Wissenschaft, Forschung und Technologie, Bonn (Germany)DEGerman