Innovative Montagetechnologie fuer Qualitaetsbauelemente (INNOMONT). Teilprojekt: LogiMont - Logistische Einfluesse bei flexiblen Montage- und Materialflusskonzepten im Backend-Bereich der Chipfertigung Abschlussbericht

Up to now there were no systematical investigations of the material flow and logistics of the backend of the semiconductor manufacturing. Because of the complex material flow and the quality related constraints a simulation aided engineering was not possible. It is target of the research project LogiMont, to elaborate the basics of a simulation support for planning the backends logistics. As a result, methods are provided, to carry out a optimized plant planning in future. An analysis of the processes and of systems of the backend was carried out fundamentally and a modular, object-oriented model was developed. The modelling accuracy is guaranteed by a high level of detail of the model and the integration from process data, which are calculated database aided. By means of the analysis of the material flow systems, which were used as reference plants, the capability of the concept realized with the software LogiFACT was proven. This software supports the user in his systematical procedure and the administration of data. The results of the project make it possible to use continuously the simulation of material flow in the field of backend engineering and to develop optimization potentials. (orig.)Available from TIB Hannover: F98B1311+a / FIZ - Fachinformationszzentrum Karlsruhe / TIB - Technische InformationsbibliothekSIGLEBundesministerium fuer Bildung, Wissenschaft, Forschung und Technologie, Bonn (Germany)DEGerman