Schichten aus kubischem Bornitrid Abschlussbericht

Presently the production of thin optical layers is restricted to materials with medium hardness properties. These layer systems cannot be used in outdoor applications. The extreme hardness of cubic boron nitride and its transparency are favourite features for a superhard optical thin film material offering completely new applications. The results of the accomplished investigations showed, that the deposition of cubic boron nitride can only be achieved with special coating sources having the desired number of ions with sufficiently high energy. In boron nitride layers coated by DC-Magnetron-sputtering no cubic phase but only the hexagonal phase could be found. With regard to high ion densities and energies the TwinMag"R - technology is presently the only promising technique in the field of large area coatings. At high power levels this sputtering method showed a tendency to create a modified layer composition and -structure, which indicates the change from the hexagonal to the cubic phase of boron nitride. Considering the high operating costs of large area coating machines supplementary tools to improve the growing conditions of c-BN (heating, BIAS-voltage) are not possible. To increase the ion yield and energy the TwinMag"R - technique must further be improved in order to allow the creation of cubic boron nitride by its own properties. (orig.)SIGLEAvailable from TIB Hannover: F97B2207+a / FIZ - Fachinformationszzentrum Karlsruhe / TIB - Technische InformationsbibliothekBundesministerium fuer Bildung, Wissenschaft, Forschung und Technologie, Bonn (Germany)DEGerman