Schicht- und Prozessentwicklung zur Beschichtung von Reibwerkzeugen zum Einsatz in der Trockenzerspanung Abschlussbericht

The report describes the development of processes and layers on the basis of two methods: magnetron sputter ion plating (MSIP) PVD for the deposition of conventional hard coatings (TiCN, TiAlCN, TiB_2, CrCN, multilayers combining TiAlN with MoS_2 or graphite) and diamond CVD for the preparation of crystalline diamond layers. PVD coating of commercial cutting tools by MSIP was realized utilizing the layering apparatus CC800. Different carbon sources can be used to obtain carbonitride PVD coatings: mechanical targets, reactive gas, carbon cathodes. The layer system TiB_2 was scaled up to industrial production. Applying the hot filament diamond CVD process hard metal and silicon nitride could be coated with diamond layers of a thickness up to 40 #mu#m. Layer tensions were reduced by utilizing optimized parameters of pretreatment and CVD process, and layer adhesion to the hard metal was improved by a newly developed multi-layer diamond coating. (WEN)SIGLEAvailable from TIB Hannover: F97B490+a / FIZ - Fachinformationszzentrum Karlsruhe / TIB - Technische InformationsbibliothekBundesministerium fuer Bildung, Wissenschaft, Forschung und Technologie, Bonn (Germany)DEGerman