Magnetron sputtering on 3d components with less accessible areas

Benien, H.
Meyer, M. (Messerschmitt-Boelkow-Blohm GmbH, Deutsche Aerospace AG, Muenchen (Germany))
Psyk, W. (Photogronics Solartechnik GmbH, Putzbrunn (Germany))
Messerschmitt-Boelkow-Blohm, Deutsche Aerospace AG, Muenchen (Germany). Zentralbereiche

Publication date

January 1991

Abstract

Also published in Metall (Mar 1991) v. 45(3) p. 246-249.With 10 figs., 3 refs.Available from TIB Hannover: RO 2656(0360-91 PUB)ME / FIZ - Fachinformationszzentrum Karlsruhe / TIB - Technische InformationsbibliothekSIGLEDEGerman

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Magnetron sputtering on 3d components with less accessible areas

Abstract

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Magnetron sputtering on 3d components with less accessible areas

Abstract

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