Schmiermittelfreier/Schmiermittelarmer Einsatz von Lagern und Bauteilen durch reib- und verschleissarme Beschichtung. Teilvorhaben: In-situ Messtechnik fuer plasmagestuetzte Beschichtungsprozesse Abschlussbericht

A heatable probe has been constructed for in-situ measurement of plasma parameters in reactive plasma coating processes. The PC controlled langmuir probe electronics allows a recording rate for a characteristic of 50 ms/scan and a potential-free measuring of the potential difference plasma-earth up to 1000 V. The probe characteristic is smoothed by a polynom filter, and from the polynom coefficients the first and second differentiation of the characteristic are obtained. The software is written in Lab-VIEW"R for the windows surface of Microsoft. Using this probe large differences in plasma densities and electron densities were found comparing two commercial magnetron sputter units and an arc evaporation unit. The plasma parameters can be adjusted within a wide range by changing the anode geometry and the strength and direction of the magnetic field. (WEN)SIGLEAvailable from TIB Hannover: F97B655+a / FIZ - Fachinformationszzentrum Karlsruhe / TIB - Technische InformationsbibliothekBundesministerium fuer Bildung, Wissenschaft, Forschung und Technologie, Bonn (Germany)DEGerman