Galvanische Abscheidung von Metallen aus nichtwaessrigen Elektrolyten fuer die Mikrosystemtechnik

This report describes the development of fundamentals and process technology of metal and metal alloy electrodeposition from nonaqueous electrolytes with the aim to increase the variety of materials for the LIGA technology and consequently to give the possibility of developing and manufacturing new microstructure devices. The up to now unsolved task of electrodeposition of d-metals like titanium and vanadium required principle electrochemical investigations of compounds of these metals in organic, aprotic electrolytes. Grey metallic electrodeposits of titanium with a content of 56% and aluminium vanadium alloy with a composition of 90 to 10 were received. By electrochemical investigations of magnesium-, aluminium- and nickel compounds and comparison to the results of titanium and vanadium deposition experiments it was possible to understand the extremely different kind of electrodeposition of these metals as a function of valence electrons and -orbitals. By means of an analysis of the phenomena of electrocrystallization, taking into account also the molecular orbital theory and literature data rules for the developement of nonaqueous electrolytes for d-metals of the 4.-6.(IVb-VIb) group of the periodic table of the elements could be derived. The process technology part of this report concerns the additive microstructuring of aluminium via UV lithography and microelectroforming. For this it was necessary to adapt the electrolyte, materials and working parameters with regard to the whole microstructuring process. (orig.)Dissertation submitted by Karthaus, J.SIGLEAvailable from TIB Hannover: ZA 5141(6455) / FIZ - Fachinformationszzentrum Karlsruhe / TIB - Technische InformationsbibliothekDEGerman