Abtragen und Strukturieren sproedharter Werkstoffe und keramischer Verbundwerkstoffe mit Excimer-Laserstrahlung Abschlussbericht zum Teilvorhaben

The project was based on the theoretical and experimental results of a former fundamental work on material removal ('Realisierungsphase I'). Processing of ceramics with excimer-laser radiation causes the formation of plasma. It arises during the pulse duration and therefore it directly influences the removal process. The investigations concentrated as well on temporal and lateral expansion as on the reflectance and transmission of the plasma. Micro-machining was done on conventional ceramics and carbonfibre reinforced carbon. The dominant process parameter is the fluence. It regulates the removal rate and the shape of the structure, like flanke angle or surface roughness. Additionally, new methods and strategies for 2- and 3-dimensional structuring with excimer-lasers were investigated. To sum up, the excimer-laser is highly suitable for micro-machining of ceramic materials. Especially the high precision, the flexible beam shaping and the minimal damage of ceramic surfaces, makes the excimer-laser an alternative to conventional machining techniques. (orig.)SIGLEAvailable from TIB Hannover: F97B736 / FIZ - Fachinformationszzentrum Karlsruhe / TIB - Technische InformationsbibliothekBundesministerium fuer Bildung, Wissenschaft, Forschung und Technologie, Bonn (Germany)DEGerman