Entwicklung einer haftfesten Diamantbeschichtung auf komplexen Werkzeuggeometrien Teilprojekt: Ramanspektroskopische Charakterisierung von Diamantschichten

The purity and film stress of diamond layers were investigated by Raman spectroscopy. The diamond layers were grown within the frame of the F and E project 13N586X on plane substrates and on substrates of complex geometry. Using the Raman derived results, the optimisation of the growth parameters and the geometry of the growth chamber led to an essential improvement of the lateral homogeneity of the diamond films. For diamond films on hardmetal substrates we observed a strong tendency towards the formation of an intermediate graphite layer. The formation of this graphite layer strongly depends on the Co-content of the substrate. We investigated diamond layers deposited on various kinds of substrates. For all substrate types good purity of the diamond layers could be achieved. However, the observed stress in the diamond layer characteristically depends on the substrate type. (orig.)SIGLEAvailable from TIB Hannover: D.Dt.F.QN1(10,14) / FIZ - Fachinformationszzentrum Karlsruhe / TIB - Technische InformationsbibliothekBundesministerium fuer Forschung und Technologie (BMFT), Bonn (Germany)DEGerman